Reaction chamber for reducing vibration in opening and closing gate valve, and machine station with same

The invention discloses a reaction chamber for reducing vibration in opening and closing a gate valve. A connecting opening between the reaction chamber and another chamber is provided with the gate valve. Opening and closing of the gate valve are pneumatically controlled. The reaction chamber is provided with a first air path for opening the gate valve and a second air path for closing the gate valve. The first air path and the second air path of the gate valve are respectively provided with a needle valve for controlling air flow, thereby prolonging time in opening and closing the gate valve. According to the reaction chamber, the needle valves are added on the air paths for opening and closing the gate valve for adjusting and controlling the gas flow of the first air path for opening the gate valve and the second air path for closing the gate value, controlling the opening speed and the closing speed of the gate valve and prolonging the opening time and closing time of the gate valve from less than one second to three seconds, thereby reducing vibration caused by opening and closing of the gate valve and ensuring normal operation of other chambers on a machine station.