Method for processing abnormal wafer

The invention provides a method for processing an abnormal wafer. The method for processing the abnormal wafer at least includes a step of removing cured polyimide on the surface of the wafer, the step at least includes: providing an abnormal wafer having a protective area on which cured polyimide i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHU XIAOZHENG, YANG XIAOSONG, FAN PEISHEN, CAO CUNPENG, YANG GUOWEI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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