Liquid metal organic compound supply system

The invention relates to a liquid metal organic compound supply system which is applied to metal organic chemical vapor deposition (MOCVD) processing equipment. The liquid metal organic compound supply system comprises a first bottle body arranged in a constant temperature device, a second bottle bo...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LU PING, SHAN YIJING, SHEN BIN, LYU BAOYUAN, DENG SHUNDA
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The invention relates to a liquid metal organic compound supply system which is applied to metal organic chemical vapor deposition (MOCVD) processing equipment. The liquid metal organic compound supply system comprises a first bottle body arranged in a constant temperature device, a second bottle body arranged at room temperature and a three-way valve. The first connecting end of the three-way valve and a first air outlet pipe of the first bottle body are connected with the MOCVD processing equipment, the second connecting end of the three-way valve is connected with a second air inlet pipe of the second bottle body, and the third connecting end of the three-way valve is connected with a first air inlet pipe of the first bottle body and a second air outlet end of the second bottle body. When the liquid metal organic compound supply system is applied to MOCVD processing, the service time of liquid high-purity metal organic compound trimethyl gallium can be prolonged, replacement frequency is reduced, and therefore the volume production capacity of the MOCVD equipment is improved, the utilization rate of trimethyl gallium is effectively improved, and use cost is lowered. In addition, the liquid metal organic compound supply system lowers manufacturing and packaging cost of the liquid high-purity metal organic compound trimethyl gallium.