Process box, assembly, and method for processing a coated substrate

The invention relates to a process box for processing a coated substrate, having the following features: a housing, which can be closed gas-tight and which forms a cavity; the housing comprises at least one housing section that is designed in such a way that the substrate can be heat-treated by means of electromagnetic heating radiation incident on the housing section; the housing has at least one housing section that can be coupled to a cooling device for cooling said housing section and at least one housing section that cannot be cooled; the cavity is divided by at least one separating wall into a process chamber for accommodating the substrate and an intermediate chamber, wherein the separating wall has one or more openings and is arranged between the substrate and the temperature-controllable housing section; the housing is provided with at least one gas feed-through for evacuating the cavity and introducing process gas into the cavity, which gas feed-through opens into the cavity and can be closed. The invention further relates to assemblies and a method for processing a coated substrate, in which method at least one housing section of the process box is cooled during and/or after the heat treatment and diffusion of a gaseous substance produced during the heat treatment to the temperature-controlled housing section is inhibited by a separating wall, which is provided with one or more openings and which is arranged between the coated substrate and the temperature-controlled housing section.