Sample observing apparatus
The invention provides a sample observing apparatus which has an electron microscope capable of observing and analyzing samples. According to the embodiments, the sample observing apparatus 1 comprises a workbench 110, a platform 120, which is positioned on the workbench 110 and where a sample 50 is...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The invention provides a sample observing apparatus which has an electron microscope capable of observing and analyzing samples. According to the embodiments, the sample observing apparatus 1 comprises a workbench 110, a platform 120, which is positioned on the workbench 110 and where a sample 50 is installed under barometric pressure, a first-axis moving unit and a second-axis moving unit 130 and 140 which are positioned on the workbench 110 and moves relatively with the platform 120 on a first-axis moving direction and a second -axis moving direction intersecting with the first-axis moving direction, and an electron microscope barrel which is connected to the first-axis moving unit and the second-axis moving unit 130 and 140 to observe the sample and retains in a vacuum state. The sample observing apparatus can observe and analyze a sample 50 under barometric pressure. |
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