Arc extinguishing method and power supply system having a power converter
An arc extinguishing method for extinguishing arcs in a plasma chamber (6) of a plasma system (1), comprising the method steps of: a. producing power during a plasma operation for producing plasma in said plasma chamber and for carrying out a plasma-processing process using the produced plasma, in w...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An arc extinguishing method for extinguishing arcs in a plasma chamber (6) of a plasma system (1), comprising the method steps of: a. producing power during a plasma operation for producing plasma in said plasma chamber and for carrying out a plasma-processing process using the produced plasma, in which a digital-to-analog converter (DAC) (41) generates an analog signal that is supplied to an amplifier path (31, 32) and amplified there; b. monitoring the plasma system with regard to the presence of an arc by means of arc identification; c. if an arc is identified in step b. : controlling the DAC by the arc identification in such a way that an analog output signal of the DAC is modified. |
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