Sheet box device capable of identifying existence of silicon wafers

The invention relates to the technical field of semiconductor manufacturing equipment, and provides a sheet box device capable of identifying the existence of silicon wafers. The sheet box device comprises a sheet box body, wherein the sheet box body is used for storing a plurality of silicon wafers. The sheet box device also comprises at least one pair of elastic pressing sheets, a plurality of pressure sensitive sensors and an RFID electronic tag, wherein the elastic pressing sheets are matched with each other and are used for restricting the positions of the silicon wafers; the pressure sensitive sensors are arranged on the rear elastic pressing sheet, the positions of the pressure sensitive sensors and the positions of the silicon wafers are distributed in a one-to-one correspondence manner, and each pressure sensitive sensor is used for sensing the pressure value of the corresponding silicon wafer; and the RFID electronic tag is arranged on the outer side wall of the sheet box body, and is used for recording the serial number of the sheet box body and the pressure values of the silicon wafers. The sheet box device can quickly and accurately determine the existence of the silicon wafers in slots, and information recorded in the RFID electronic tag can be directly read before the silicon wafers are taken and placed, so that the operation is convenient and quick.