Angular acceleration sensor and acceleration sensor

Provided are an angular acceleration sensor and an acceleration sensor that enable both a wide detection area and a high signal-to-noise (S/N) ratio to be established. The angular acceleration sensor (10) has a flat plate surface that follows the X-Y plane, and is provided with a stationary part (12...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ICHIMARU MASAYUKI, KITAI MASAHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	Provided are an angular acceleration sensor and an acceleration sensor that enable both a wide detection area and a high signal-to-noise (S/N) ratio to be established. The angular acceleration sensor (10) has a flat plate surface that follows the X-Y plane, and is provided with a stationary part (12), a weight part (13), a beam part (14), and piezoresistive elements (15A to 15D). The weight part (13) provides support to the stationary part (12). The beam part (14) stretches along the Y-axis, and is connected to the stationary part (12) and the weight part (13). The width dimension of the beam part in the X-axis direction is larger than the width dimension of a connection part (12B) of the beam part (14) and the stationary part (12).