Angular acceleration sensor and acceleration sensor

Angular acceleration sensor and acceleration sensor

Provided are an angular acceleration sensor and an acceleration sensor that enable both a wide detection area and a high signal-to-noise (S/N) ratio to be established. The angular acceleration sensor (10) has a flat plate surface that follows the X-Y plane, and is provided with a stationary part (12...

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Hauptverfasser: ICHIMARU MASAYUKI, KITAI MASAHIRO
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Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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creator ICHIMARU MASAYUKI
KITAI MASAHIRO
description Provided are an angular acceleration sensor and an acceleration sensor that enable both a wide detection area and a high signal-to-noise (S/N) ratio to be established. The angular acceleration sensor (10) has a flat plate surface that follows the X-Y plane, and is provided with a stationary part (12), a weight part (13), a beam part (14), and piezoresistive elements (15A to 15D). The weight part (13) provides support to the stationary part (12). The beam part (14) stretches along the Y-axis, and is connected to the stationary part (12) and the weight part (13). The beam part (14) is provided with through holes (27A to 27D), which penetrate in the Z-axis direction, and width direction protrusions (28A, 28B) that protrude in the X-axis direction. The positions of the piezoresistive elements (15A to 15D) in the Y-axis direction overlap with the through holes (27A to 27D), and are offset from the width direction protrusions (28A, 28B).
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title Angular acceleration sensor and acceleration sensor
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