Angular acceleration sensor and acceleration sensor
Provided are an angular acceleration sensor and an acceleration sensor that enable both a wide detection area and a high signal-to-noise (S/N) ratio to be established. The angular acceleration sensor (10) has a flat plate surface that follows the X-Y plane, and is provided with a stationary part (12...
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Zusammenfassung: | Provided are an angular acceleration sensor and an acceleration sensor that enable both a wide detection area and a high signal-to-noise (S/N) ratio to be established. The angular acceleration sensor (10) has a flat plate surface that follows the X-Y plane, and is provided with a stationary part (12), a weight part (13), a beam part (14), and piezoresistive elements (15A to 15D). The weight part (13) provides support to the stationary part (12). The beam part (14) stretches along the Y-axis, and is connected to the stationary part (12) and the weight part (13). The beam part (14) is provided with through holes (27A to 27D), which penetrate in the Z-axis direction, and width direction protrusions (28A, 28B) that protrude in the X-axis direction. The positions of the piezoresistive elements (15A to 15D) in the Y-axis direction overlap with the through holes (27A to 27D), and are offset from the width direction protrusions (28A, 28B). |
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