Real-time monitoring device and method for injection dose of small-area ion beam radiation small sample

The invention discloses a real-time monitoring device and method for the injection dose of a small-area ion beam radiation small sample. The monitoring device comprises a beam measuring metal receiving barrel bottom, a metal sample table, a material sample to be radiated, a beam measuring metal rece...

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1. Verfasser: REN XIAOTANG
Format: Patent
Sprache:eng
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Zusammenfassung:The invention discloses a real-time monitoring device and method for the injection dose of a small-area ion beam radiation small sample. The monitoring device comprises a beam measuring metal receiving barrel bottom, a metal sample table, a material sample to be radiated, a beam measuring metal receiving barrel, an insulating and isolating ring, a restraining electrode, a binding post, a beam current integrator and an ion beam regulating device. The metal sample table and the beam measuring metal receiving barrel bottom are organically combined into a whole, so that real-time online accurate monitoring of the injection dose of the small-area ion beam radiation small sample is realized; the influence of generated secondary electrons on the measurement accuracy is avoided, and the defect of failure in online monitoring of the radiation dose in intercepting measurement is overcome; a through-beam hole in the restraining electrode and the metal sample table are correlated in diameter, and can be made into various specifications for pairwise use; the beam intensity of incident ion beams varies in a fluctuating way during radiation, so that accurate measurement of the final radiation injection dose is not influenced; the method is simple and clear, is low in cost, and is reliable to use.