Angular acceleration sensor

An angular acceleration sensor (10) having a planar surface and comprising a fixing section (12), a weight section (13), and a beam section (14). The weight section (13) has a recessed section (13A) that is recessed in the X-axis negative direction in the planar surface. The fixing section (12) has...

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Bibliographische Detailangaben
1. Verfasser:	ICHIMARU MASAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An angular acceleration sensor (10) having a planar surface and comprising a fixing section (12), a weight section (13), and a beam section (14). The weight section (13) has a recessed section (13A) that is recessed in the X-axis negative direction in the planar surface. The fixing section (12) has a protruding section (12A) that protrudes in the X-axis negative direction in the planar surface and faces the recessed section (13A), and a slit (18A) that penetrates in the X-axis positive direction from a position adjacent to the protruding section (12A). The beam section (14) extends along the Y axis in the planar surface, is connected between the recessed section (13A) and the protruding section (12A), and supports the weight section (13) so as to be displaceable relative to the fixing section (12).