Angular acceleration sensor

An angular acceleration sensor (10) having a planar surface and comprising a fixing section (12), a weight section (13), and a beam section (14). The weight section (13) has a recessed section (13A) that is recessed in the X-axis negative direction in the planar surface. The fixing section (12) has...

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Bibliographische Detailangaben
1. Verfasser:	ICHIMARU MASAYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An angular acceleration sensor (10) having a planar surface and comprising a fixing section (12), a weight section (13), and a beam section (14). The weight section (13) has a recessed section (13A) that is recessed in the X-axis negative direction in the planar surface. The fixing section (12) has a protruding section (12A) protruding in the X-axis negative direction and facing the recessed section (13A), in the planar surface. The beam section (14) extends from the protruding section (12a) in the Y-axis positive direction in the planar surface, and is connected to the recessed section (13A) at the end section in the Y-axis positive direction. Beam section vicinity areas (12B, 13B) in the vicinity of the connection position to the beam section (14), in the fixing section and the weight section (13), have planar symmetry in the planar surface, using the stress neutral plane (P) as the border therebetween.