Sensor for measuring surface non-uniformity

Sensor for measuring surface non-uniformity

A method includes forming a two-dimensional interrogating beam on a selected sample region of a surface; collecting light transmitted through or reflected from the sample region with an array of lenses to form a sample array of focus spots; imaging the sample array of focus spots through an imaging...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LAI JACK W, QIAO YI, RIBNICK EVAN J, HOFELDT DAVID L
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A method includes forming a two-dimensional interrogating beam on a selected sample region of a surface; collecting light transmitted through or reflected from the sample region with an array of lenses to form a sample array of focus spots; imaging the sample array of focus spots through an imaging lens on a sensor; and comparing an image of the sample array of focus spots to a reference array of focus spots to determine a level of non-uniformity in the sample region.