Multi-electrode-plate laminating type electrofluid dynamic micro-pump

The invention discloses a multi-electrode-plate laminating type electrofluid dynamic micro-pump. The multi-electrode-plate laminating type electrofluid dynamic micro-pump comprises an upper cover plate, an upper silicone membrane, a middle silicone membrane, a lower silicone membrane, an upper electrode plate, a middle electrode plate and a lower electrode plate, wherein the upper cover plate, the silicone membranes and the electrode plates are arranged in sequence from top to bottom. A comb-tooth-shaped electrode array is formed by collector electrodes and emitting electrodes on the upper, middle and lower electrode plates. Rounded rectangular troughs are machined in the middle portions of the three silicone membranes, and after the components are assembled, S-shaped micro-pump cavities are formed by the troughs and through holes in the three electrode plates. When the multi-electrode-plate laminating type electrofluid dynamic micro-pump is used, a liquid inflow pipe and a liquid outflow pipe are connected with an external circulating system, the whole cavities are filled with liquid, then the micro-pump is connected with a 500V direct-current power source, and the liquid is driven to flow through the electrofluid dynamic effect. According to the multi-electrode-plate laminating type electrofluid dynamic micro-pump, a multi-electrode-plate laminating type structure is adopted, the cavities on three layers are connected through the through holes, and a serial liquid channel is formed. Electric fields are generated by the three electrode plates at the same time, the effect of dragging ions is enhanced, and the dynamic effect of the electrofluid dynamic micro-pump is substantially improved.