Quality control method by means of test data

The invention discloses a quality control method by means of test data. A wafer is divided into a plurality of elements to be tested, electrical characteristic and efficacy of each element to be tested are tested through the wafer test, a collecting unit collects the batch number of the wafer, the m...

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1. Verfasser: CHEN KUNZHONG
Format: Patent
Sprache:eng
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Zusammenfassung:The invention discloses a quality control method by means of test data. A wafer is divided into a plurality of elements to be tested, electrical characteristic and efficacy of each element to be tested are tested through the wafer test, a collecting unit collects the batch number of the wafer, the model number of the wafer, the coordinate of each element to be tested on the wafer, the number of each element to be tested, the test parameter of each element to be tested, and test result data after the wafer test of the wafer, and the above data is sent to a test data analysis station for analysis, a normal distribution diagram of collected data is manufactured based on the data, the difference and standard deviation are worked out, and the difference and standard deviation can be used as a quality controlling and monitoring method or can be used for analyzing the stability of the test program.