Plasma etching equipment cavity sealing face protecting device

The invention discloses a plasma etching equipment cavity sealing face protecting device. The plasma etching equipment cavity sealing face protecting device comprises a top disc, a cavity side wall, a sealing ring and an elastic sheet. The top disc is made of quartz materials and forms a cavity top of plasma etching equipment. A sealing face is formed between the cavity side wall and the top disc. The sealing ring is arranged between the top disc and the cavity side wall. The elastic sheet is arranged between the top disc and the cavity side wall, and the elastic sheet and the sealing ring are arranged in a spaced mode. The elastic sheet is located on the side, facing a vacuum cavity, of the sealing ring. Due to the fact that the sealing ring is arranged between the top disc and the cavity side wall, and the elastic sheet is arranged between the top disc and the cavity side wall and located on the side, facing the vacuum cavity, of the sealing ring in a spaced mode, the top disc tightly adjacent to the sealing ring is effectively prevented from being etched, the sealing character is kept, the top disc replacement time is delayed, the service life of the top disc is prolonged, and the production cost is reduced.