Cross-scale two-dimensional large-stroke high-speed and high-precision motion platform

The invention relates to a cross-scale two-dimensional large-stroke high-speed and high-precision motion platform. The cross-scale two-dimensional large-stroke high-speed and high-precision motion platform is of an H-shaped structure and is composed of a Y-direction working platform on the upper layer, an X-direction dual-edge driving working platform on the lower layer, a marble platform and a support. The Y-direction working platform on the upper layer is connected with the X-direction dual-edge driving working platform on the lower layer in series, a high-speed rolling linear guideway is used for guiding, and a grating ruler is adopted for position feedback. The Y-direction working platform on the upper layer is driven by a linear motor and is fixed to a movable platform of the X-direction dual-edge driving working platform on the lower layer through an adapter plate; the X-direction dual-edge driving working platform on the lower layer is driven by two linear motors at the same time and is fixed to the marble platform through screws; the marble platform is placed on the support. By means of the cross-scale two-dimensional large-stroke high-speed and high-precision motion platform, a two-dimensional motion platform driven by the linear motors, fed back by the grating ruler and guided by the rolling guideway is adopted, the structure is high, the rigidity is high, the bearing capacity is large, the positioning accuracy is high, and the two-dimensional large-stroke high-speed and high-precision motion can be achieved.