Substrate lamination device and alignment method

The invention provides a substrate lamination device and an alignment method. The substrate lamination device comprises a vacuum chamber; a flexible film, which can be used to divide a vacuum chamber into a first chamber and a second chamber; and a substrate supporting member.

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Bibliographische Detailangaben
Hauptverfasser:	BARNIDGE TRACY J, TCHON JOSEPH L, SAMPICA JAMES D, MARZEN VINCENT P, NEMETH PAUL R
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	The invention provides a substrate lamination device and an alignment method. The substrate lamination device comprises a vacuum chamber; a flexible film, which can be used to divide a vacuum chamber into a first chamber and a second chamber; and a substrate supporting member.