Multi-group electrode flush type electric hydrodynamic force micro-pump

The invention discloses a multi-group electrode flush type electric hydrodynamic force micro-pump. The multi-group electrode flush type electric hydrodynamic force micro-pump comprises an electrode slice and a cavity covering plate covering on the electrode slice, wherein a periphery of the cavity cover plate is sealed and combined with the electrode slice; three groups of comb-shaped electrode arrays with the same structure are arranged on a combining face of the electrode slice and the cavity cover plate; 8-shaped grooves are arranged on the combining face of the cavity cover plate and the electrode slice; a fluid flow outlet and a fluid flow inlet are respectively arranged at the corresponding tail end and the beginning end of the electrode in the grooves. The fluid flow inlet on the cavity cover plate is used as a micro-pump inlet, so that the fluid is distributed between 8-shaped grooves, and between collectors and emitting electrodes of the three groups of the comb-shaped electrode arrays; through the fluid flow outlet, the joined outflow of fluid in parallel can be completed, the efficiency of the micro-pump is effectively improved, and the power effect of an electric hydrodynamic force pump is greatly promoted; and thereby the chip energy can be timely discharged; the multi-group electrode flush type electric hydrodynamic force micro-pump overcomes the shortcomings of being easy to damage and unstable in work in the prior art for the chip cannot radiate timely.