Different-space different-size substrate alignment method

The invention relates to a different-space different-size substrate alignment method, which comprises: capturing actual local images of two substrates with different sizes; comparing the particular labels of the two substrates within the standard local character regions, and acquiring the particular...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANG JUNMING, WEN ZHIQUN, LIN SHIWEI, LIN CHONGTIAN
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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