Antenna cover and plasma generating device using same

The invention provides an antenna cover for maintaining the generating efficiency of plasma and reducing the influence of the consumption caused by the plasma, and a plasma generating device using the same. The antenna cover (30) protects a surface of an antenna (20) provided in a plasma chamber (12...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NINOMIYA SHIRO, SATO MASATERU
Format:	Patent
Sprache:	eng
Schlagworte:	ANTENNAS, i.e. RADIO AERIALS BASIC ELECTRIC ELEMENTS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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