Testing method and testing structure

The invention provides a testing method and a testing structure and relates to the technical field of semiconductors. The testing method comprises the steps of forming the testing structure including at least two capacitors equal in design value and comparing actual values of at least two capacitors...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CAI MENGFENG, ZHANG BUXIN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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