Alignment imaging device

The invention discloses an alignment imaging device which comprises a coaxial lighting assembly, an imaging assembly and a controller, wherein the coaxial lighting assembly comprises a lighting front group and an image enhancement assembly, and a cube-corner prism group, a Fresnel lens or a binary o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	PAN LIANDONG, YU DAWEI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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