Alignment imaging device

The invention discloses an alignment imaging device which comprises a coaxial lighting assembly, an imaging assembly and a controller, wherein the coaxial lighting assembly comprises a lighting front group and an image enhancement assembly, and a cube-corner prism group, a Fresnel lens or a binary optical element is adopted as the image enhancement assembly; the imaging assembly sequentially comprises an imaging front group, a light splitting unit, an imaging aperture diaphragm, an imaging rear group and a detector along the light propagation direction; the controller is connected with the lighting front group, the image enhancement assembly and the detector; the light beam generated by the lighting front group is adjusted by the image enhancement assembly and is then irradiated onto a silicon slice by the light splitting unit and the imaging front group; an alignment mark on the silicon slice is imaged onto the detector by the imaging front group, the light splitting unit, the imaging aperture diaphragm and the imaging rear group. Compared with the prior art, the cube-corner prism group, the Fresnel lens or the binary optical element is adopted for the alignment imaging device to form a Kohler coaxial illumination light path together with the lighting front group and the imaging front group, so that different image enhancement modes can be rapidly, simply and conveniently switched by being aligned to an imaging lens; in the switching process, extra energy loss is not caused.