Member with reflection preventing function and manufacturing method thereof
The invention provides a member with a reflection preventing function and a manufacturing method thereof. A thin alumina film is uniformly formed on a substrate, and a uniform micro concave-convex reflection preventing structure is obtained. The member (10) with a reflection preventing function is p...
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| creator | SHOHEI SENBA HIDEHITO SUEKI |
| description | The invention provides a member with a reflection preventing function and a manufacturing method thereof. A thin alumina film is uniformly formed on a substrate, and a uniform micro concave-convex reflection preventing structure is obtained. The member (10) with a reflection preventing function is provided with a substrate (11) and a reflection preventing film (13) on the surface of the substrate (11). The reflection preventing film (13) performs hydro-thermal treatment on the alumina film by using high-temperature water or steam, the alumina film being formed by an atomic layer deposition method, and thus, the micro concave-convex structure is formed. |
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A thin alumina film is uniformly formed on a substrate, and a uniform micro concave-convex reflection preventing structure is obtained. The member (10) with a reflection preventing function is provided with a substrate (11) and a reflection preventing film (13) on the surface of the substrate (11). The reflection preventing film (13) performs hydro-thermal treatment on the alumina film by using high-temperature water or steam, the alumina film being formed by an atomic layer deposition method, and thus, the micro concave-convex structure is formed.</description><language>eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150610&DB=EPODOC&CC=CN&NR=104698512A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150610&DB=EPODOC&CC=CN&NR=104698512A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SHOHEI SENBA</creatorcontrib><creatorcontrib>HIDEHITO SUEKI</creatorcontrib><title>Member with reflection preventing function and manufacturing method thereof</title><description>The invention provides a member with a reflection preventing function and a manufacturing method thereof. A thin alumina film is uniformly formed on a substrate, and a uniform micro concave-convex reflection preventing structure is obtained. The member (10) with a reflection preventing function is provided with a substrate (11) and a reflection preventing film (13) on the surface of the substrate (11). The reflection preventing film (13) performs hydro-thermal treatment on the alumina film by using high-temperature water or steam, the alumina film being formed by an atomic layer deposition method, and thus, the micro concave-convex structure is formed.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPD2Tc1NSi1SKM8syVAoSk3LSU0uyczPUygoSi1LzSvJzEtXSCvNg4gl5qUo5CbmlaYlJpeUFoGkclNLMvJTFEoyUotS89N4GFjTEnOKU3mhNDeDoptriLOHbmpBfnxqcUFicmpeakm8s5-hgYmZpYWpoZGjMTFqALkRNjY</recordid><startdate>20150610</startdate><enddate>20150610</enddate><creator>SHOHEI SENBA</creator><creator>HIDEHITO SUEKI</creator><scope>EVB</scope></search><sort><creationdate>20150610</creationdate><title>Member with reflection preventing function and manufacturing method thereof</title><author>SHOHEI SENBA ; HIDEHITO SUEKI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN104698512A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2015</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PHYSICS</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>SHOHEI SENBA</creatorcontrib><creatorcontrib>HIDEHITO SUEKI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SHOHEI SENBA</au><au>HIDEHITO SUEKI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Member with reflection preventing function and manufacturing method thereof</title><date>2015-06-10</date><risdate>2015</risdate><abstract>The invention provides a member with a reflection preventing function and a manufacturing method thereof. A thin alumina film is uniformly formed on a substrate, and a uniform micro concave-convex reflection preventing structure is obtained. The member (10) with a reflection preventing function is provided with a substrate (11) and a reflection preventing film (13) on the surface of the substrate (11). The reflection preventing film (13) performs hydro-thermal treatment on the alumina film by using high-temperature water or steam, the alumina film being formed by an atomic layer deposition method, and thus, the micro concave-convex structure is formed.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Member with reflection preventing function and manufacturing method thereof |
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