Member with reflection preventing function and manufacturing method thereof

The invention provides a member with a reflection preventing function and a manufacturing method thereof. A thin alumina film is uniformly formed on a substrate, and a uniform micro concave-convex reflection preventing structure is obtained. The member (10) with a reflection preventing function is p...

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Bibliographische Detailangaben
Hauptverfasser:	SHOHEI SENBA, HIDEHITO SUEKI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention provides a member with a reflection preventing function and a manufacturing method thereof. A thin alumina film is uniformly formed on a substrate, and a uniform micro concave-convex reflection preventing structure is obtained. The member (10) with a reflection preventing function is provided with a substrate (11) and a reflection preventing film (13) on the surface of the substrate (11). The reflection preventing film (13) performs hydro-thermal treatment on the alumina film by using high-temperature water or steam, the alumina film being formed by an atomic layer deposition method, and thus, the micro concave-convex structure is formed.