Piezoresistive pressure transducer with self-detection device and preparation method thereof

The invention discloses a piezoresistive pressure transducer with a self-detection device and a preparation method thereof. The piezoresistive pressure transducer with the self-detection device comprises a glass substrate, a self-detection electrode, a silicon substrate, a corrosion stopping layer, an epitaxial monocrystalline silicon layer, a piezoresistive strip, a passivation layer and a metal lead; a vacuum sealing cavity is arranged in the silicon substrate; the self-detection electrode is connected with the glass substrate, and the epitaxial monocrystalline silicon layer grows above the corrosion stopping layer; light phosphorous ion doping is carried out on the epitaxial monocrystalline silicon layer to form the piezoresistive strip; the epitaxial monocrystalline silicon layer region is doped to form a heavily phosphorous ion doped diffusion region; the passivation layer covers the surface of the epitaxial monocrystalline silicon layer; the lower part of the metal lead enters an electrode lead-out hole of the passivation layer and has ohmic contact with the heavily phosphorous ion doped diffusion region; the piezoresistive strip forms a Wheatstone bridge. The pressure sensor uses static electricity to simulate the pressure value in the actual detection, the pressure value change can be realized quickly, and the efficiency is higher when analyzing the sensor performance. The preparation method is easy to perform.