Welding method for nickel or nickel alloy target and back panel

The invention belongs to the technical field of target manufacturing and discloses a method for welding a nickel or nickel alloy target and a back panel. The method comprises the following steps: firstly, surface treatment is performed on welding surfaces of the target and the back panel, after trea...

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Bibliographische Detailangaben
Hauptverfasser:	LIU HONGBIN, DONG TINGYI, WANG YUE, SHANG ZAIYAN, HE JINJIANG, XU XUELI, ZHU XIAOGUANG, WANG XINGQUAN
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	The invention belongs to the technical field of target manufacturing and discloses a method for welding a nickel or nickel alloy target and a back panel. The method comprises the following steps: firstly, surface treatment is performed on welding surfaces of the target and the back panel, after treatment, a sheath is externally added, then a diffusion welding method is used for welding the nickel or nickel alloy target onto the back panel. The diffusion welding method provided by the invention can achieve high-intensity and high welding rate welding to the nickel or nickel alloy target with a large area, ensures favorable heat conduction of the target and the back panel, prevents conditions, such as deformation, warpage, detachment and the like between the target and the back panel, caused by over-high sputtering power of the nickel or nickel alloy target, and ensures the sputtering performance of the nickel or nickel alloy target.