Analysis system for determining impurity components in highly pure gases, and determination method thereof

The invention discloses an analysis system for determining impurity components in highly pure gases, and a determination method thereof. The analysis system comprises a helium ionization detector, a hydrogen flame detector, seven valves, seven columns and three sample quantification rings, and the detection of many impurity components, such as nitrogen, hydrogen, oxygen/argon, carbon monoxide, carbon dioxide, methane, ethane/ethylene, acetylene and C3 hydrocarbon impurities in various highly pure gases, such as highly pure ammonia, highly pure oxygen, highly pure nitrogen and highly pure hydrogen is realized on the analysis system. The method allows impurities in the highly pure gases to be separated through chromatographic columns and to be detected through the helium ionization detector and the hydrogen flame detector by adjusting the opening or closure of the valves to obtain the determination data of the impurities. The analysis system can detect a variety of impurities in highly pure industrial gases, so the determination cost is reduced; and the method can satisfy the sensitivity requirement of highly pure gas analysis and the detection limit requirements of all impurity gases, and greatly increases the analysis efficiency.