Electrostatic Application Method And Electrostatic Application Apparatus

The present invention realizes the application which is good in edge linearity and uniform in pattern width. In an electrostatic application method, by applying a potential difference, a liquid gathering part extending towards an application object side is formed at the front end of a nozzle, and th...

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Bibliographische Detailangaben
Hauptverfasser:	KOTA NAKAHIRA, TOSHIFUMI NAGINO, SHUZO TSUCHIDA, AKIHIRO HORIKAWA
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS NOZZLES PERFORMING OPERATIONS PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention realizes the application which is good in edge linearity and uniform in pattern width. In an electrostatic application method, by applying a potential difference, a liquid gathering part extending towards an application object side is formed at the front end of a nozzle, and the front end of a pin in the nozzle is configured to protrude towards the liquid gathering part, so that the front end of the liquid gathering part is contacted with an application object, and the liquid contained in the nozzle is applied to the application object.