Combined high-accuracy three-axis force sensor

The invention discloses a combined high-accuracy three-axis force sensor, and belongs to the technical field of mechanical design and sensing measurement. The combined high-accuracy three-axis force sensor comprises three main modules including a stress module, an installation module and resistance strain gauges, and peripheral devices including an installation base, a part to be measured and a peripheral measuring circuit. The stress module and the installation module are connected into a whole through screws, so that a body of the combined high-accuracy three-axis force sensor is formed; due to the fact that the stress module and the part to be measured are installed through a screw, input of three-axis force is achieved; due to the fact that the installation module is installed on the installation base, fixation of the sensor is achieved; the four resistance strain gauges are arranged on each measuring module of the combined high-accuracy three-axis force sensor, a full-bridge measuring circuit is formed, and electric signals obtained through measurement are output to the peripheral circuit, so that measurement of force in three directions is achieved. The combined high-accuracy three-axis force sensor can achieve high-accuracy measurement of grinding force, borne by a workpiece, in the X-axis direction, the Y-axis direction and the Z-axis direction in a precise micro grinding machining process at the same time.