Mounting and adjusting device of extreme ultraviolet reflection lens

The invention discloses a mounting and adjusting device of an extreme ultraviolet reflection lens. The mounting and adjusting device is used for mounting and adjusting the lens (2) and comprises a cavity (1), a lens supporting frame (3), embracing and pressing systems (4) and supporting systems (5), a through hole is formed in the bottom wall of the cavity, the lens supporting frame is positioned in the cavity and used for supporting the lens, the embracing and pressing systems are used for fixing the lens on the lens supporting frame, the supporting systems penetrate into the cavity through the through hole of the cavity, a portion, positioned in the cavity, of each supporting system is fixedly connected with the bottom of the lens supporting frame, each supporting system comprises an upper flange, a lower flange, a corrugated pipe and a supporting screw, each upper flange and the corresponding lower flange are fixedly connected with two ends of the corresponding corrugated pipe respectively, axially aligned and provided with through holes in the centers, and the supporting screws sequentially penetrate the through hole of the cavity and the through holes in the centers of the lower flanges, the corrugated pipes and the upper flanges to be abutted against the bottom of the lens supporting frame. By the mounting and adjusting device, three-dimensional adjusting of the lens and the lens supporting frame can be realized, and vibration influence, on the lens, of a vacuum air pump is isolated.