Ceramic heater for semiconductor manufacturing device

The invention provides a ceramic heater capable of realizing uniform temperature distribution on the whole surface of a wafer-carrying surface. The ceramic heater (10) is provided with a circular-plate-shaped ceramic substrate (1) and a cylindrical support body (3) connected to backside (1b) at an o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIKUMO AKIRA, NATSUHARA MASUHIRO, KIMURA KOICHI
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!