Glass coating outlet pot-separating control method and system

The invention discloses a glass coating outlet pot-separating control method and a glass coating outlet pot-separating control system. The method is used for pot-separating control in an outlet transition chamber for glass coated with film in a vacuum sputtering chamber, and comprises the following...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YANG XUELAI, ZHANG XIAODI, HAO XIANGDONG
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS GLASS JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS
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