Singulation apparatus and method

Disclosed is a singulation apparatus, comprising: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side op...

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Bibliographische Detailangaben
Hauptverfasser: CHENG CHI WAH, TANG HOI SHUEN, JOSEPH, LIU CHUN KIT, CHOW LAP KEI, ERIC
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed is a singulation apparatus, comprising: at least one chuck station to which a workpiece is securable, the at least one chuck station being configured to move along a feed direction; a bridge extending above the at least one chuck station, the bridge having a first side and a second side opposite the first side; a first cutting device members mounted to the bridge and being independently movable along the first side, transversely to the feed direction; and a second cutting device members mounted to the bridge and being independently movable along the second side, transversely to the feed direction, the first and second cutting devices being for cutting the workpiece. A singulation method is also disclosed.