Additive for polishing composition

The present invention discloses an additive for polishing composition, which can ensure stable polishing properties. The additive for polishing composition contains one or more amine compounds and an alcohol. The one or more amine compounds contain a quaternary ammonium salt. In one embodiment, when...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MASASHI TERAMOTO, HIROSHI MAKINO, RYOKO YAMADA
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention discloses an additive for polishing composition, which can ensure stable polishing properties. The additive for polishing composition contains one or more amine compounds and an alcohol. The one or more amine compounds contain a quaternary ammonium salt. In one embodiment, when the one or more amine compounds are contained in high concentration, the occurrence of precipitation of the amine compound can be prevented by including the alcohol.