Polishing pad and method for manufacturing same

According to the present invention, the method for manufacturing a polishing pad by mixing a polishing layer forming material and solidifying the material through a chemical reaction includes: a step of forming micro organic particles by pulverizing an organic material using a physical method; a ste...

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Bibliographische Detailangaben
Hauptverfasser: AHN BONG-SU, KIM SEUNG-GEUN, SEO JANG-WON, SONG KEEON, LEE SANG-MOK, KANG HAK-SU, JANG YOUNG-JUN, CHOO JEONG-SEON, JEONG JIN-SU, KONG GYOUNG-PYO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to the present invention, the method for manufacturing a polishing pad by mixing a polishing layer forming material and solidifying the material through a chemical reaction includes: a step of forming micro organic particles by pulverizing an organic material using a physical method; a step of mixing the micro organic particles formed in the above step with the polishing layer forming material; a step of forming gaseous pores by mixing the mixture obtained in the above step with a pore size-controllable inert gas, a capsule-type foaming agent, or a chemical foaming agent; a step of producing a polishing layer by gelating and curing the mixture obtained in the above step; and a step of distributing the pores through the opening of the gaseous pores on a surface by processing the polishing layer.