Automatic overturning structure of single vacuum-coating-equipment rotating-stand slide and method

The invention relates to the field of single vacuum coating, and concretely relates to an automatic overturning structure of a ngle vacuum-coating-equipment rotating-stand slide and a method. The structure comprises a bottom plate, a closed-loop conveying mechanism arranged on the bottom plate and a...

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1. Verfasser: SHAO HAIPING
Format: Patent
Sprache:eng
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Zusammenfassung:The invention relates to the field of single vacuum coating, and concretely relates to an automatic overturning structure of a ngle vacuum-coating-equipment rotating-stand slide and a method. The structure comprises a bottom plate, a closed-loop conveying mechanism arranged on the bottom plate and a driving mechanism driving the closed-loop conveying mechanism; the closed-loop conveying mechanism is provided with a rotating assembly conveyed by the closed-loop conveying mechanism; the outer side of the rotating assembly is provided with three or more of support rods capable of rotating along with the rotating assembly, and the rotating assembly is provided with a fixing assembly for fixing a slide; and one side of the closed-loop conveying mechanism is provided with a blocking assembly for blocking the support rods. By using closed-loop conveying, all fixing positions of the slide can be reached; by putting the slide on a rotation shaft and through the support rods on the rotation shaft and the mutual cooperation of a block and a blocking rod, the slide can automatically rotate at any angle, thus the problem that the slide cannot be automatically overturned in the prior art is solved, and therefore coating of the front side and the back side can be finished in one time under a vacuum condition, and the film forming quality is high.