Rotation switching arm adaptive protection device and protection method thereof

The invention relates to a rotation switching arm adaptive protection device and a protection method thereof. The device comprises an adsorption unit, a protection unit, and an installation positioning and leveling unit. The adsorption unit comprises a suction cup and gas pipe joints arranged on and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHENG FENGBIAO, MA XIBAO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to a rotation switching arm adaptive protection device and a protection method thereof. The device comprises an adsorption unit, a protection unit, and an installation positioning and leveling unit. The adsorption unit comprises a suction cup and gas pipe joints arranged on and communicated with the suction cup. The installation positioning and leveling unit is fixed above the suction cup, and comprises a Z-direction lifting mechanism, a tilting mechanism and an elastic mechanism, wherein the Z-direction lifting mechanism is connected with the tilting mechanism through the elastic mechanism to jointly control the Z-direction movement and tilting adjustment of the suction cup. The protection unit comprises a vacuum system and a feedback system which provides vacuum pressure compensation for the vacuum system. Adaptive contact and joint of a contact surface of a mask in the adsorption process is realized by the installation positioning and leveling unit. Meanwhile, the feedback system is arranged in the protection unit, which solves the safety problem caused by insecure mask adsorption and insufficient vacuum degree.