Measuring device, substrate processing system and measuring method
The present invention provides a measuring device capable of achieving light weight and low cost, a substrate processing system and a measuring method. The measuring device according to one embodiment comprises a carrying part, a shooting part and measuring part. The carrying part carries a substrat...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention provides a measuring device capable of achieving light weight and low cost, a substrate processing system and a measuring method. The measuring device according to one embodiment comprises a carrying part, a shooting part and measuring part. The carrying part carries a substrate provided with a pattern. The shooting part is arranged over the carrying part and shoots the pattern of the substrate carried on the carrying part. In addition, the measuring part measures the shape of the pattern according to image information of the pattern shot by the shooting part. |
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