Evaporation source and evaporation device
The invention discloses an evaporation source and an evaporation device, wherein a heating element which is distributed in the length direction of the evaporation source is arranged in the evaporation source; the heating element comprises a plurality of heating parts which are connected in series; t...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The invention discloses an evaporation source and an evaporation device, wherein a heating element which is distributed in the length direction of the evaporation source is arranged in the evaporation source; the heating element comprises a plurality of heating parts which are connected in series; the thermal power of the heating parts, corresponding to both ends in the length direction, of the evaporation source is bigger than that of the heat part arranged at the middle position, in the length direction, of the evaporation source. According to the invention, the thermal power of the heating parts arranged at both ends of the evaporation source is bigger than the heating part arranged at the middle position, so that heat loss at the two ends of the evaporation source can be compensated, the temperature in the evaporation source can be distributed more uniformly, the consumption rate of an evaporation material is more uniform, the service cycle of the evaporation source is prolonged. |
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