Charged-particle radiation device

When using a charged-particle radiation device, observation is typically performed at a magnification of at least 10000 times, and it can be difficult to identify the correspondence between the orientation of a sample seen with the naked eye and the orientation of a sample in an obtained image, as w...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ANDO TOHRU, SHIGETO KUNJI, TAMAYAMA SHOTARO, NARITA YUSUKE
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:When using a charged-particle radiation device, observation is typically performed at a magnification of at least 10000 times, and it can be difficult to identify the correspondence between the orientation of a sample seen with the naked eye and the orientation of a sample in an obtained image, as well as intuitively ascertain the sample orientation or other attributes. The present invention addresses the objective of intuitively ascertaining the orientation and inclination of a sample, and is characterized in being provided with: a charged-particle radiation source for emitting charged-particle radiation, a charged-particle optical system for irradiating the sample with charged particle radiation, a sample stand on which the sample is placed, a stage allowing the sample stand to be moved at least in the inclination direction, a display unit for displaying the state of inclination of the sample stand using a simulated image thereof, an input unit into which a user issues instructions regarding the observation location and observation direction of the sample, and a control unit for controlling the amount of movement of the stage on the basis of the signal inputted by the operation unit.