High-efficiency flexible thin film solar cell manufacturing method
The invention discloses a high-efficiency flexible thin film solar cell manufacturing method. The method includes providing an epitaxial substrate; growing an epitaxial structure on the epitaxial substrate; growing an ohmic contact layer on the epitaxial structure, and growing an epitaxial protectin...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | The invention discloses a high-efficiency flexible thin film solar cell manufacturing method. The method includes providing an epitaxial substrate; growing an epitaxial structure on the epitaxial substrate; growing an ohmic contact layer on the epitaxial structure, and growing an epitaxial protecting layer on the ohmic contact layer; bonding the epitaxial protecting layer on a rigid supporting template; adopting an epitaxial substrate thinning process to thin the epitaxial substrate; evaporating a back electrode on the thinned epitaxial substrate, and bonding the thinned epitaxial substrate on a flexible thin film substrate; removing the rigid supporting template and the epitaxial protecting layer; evaporating front grid electrodes on the ohmic contact layer, removing the ohmic contact layer of a light absorbing portion through a selective corrosion process, evaporating an anti-reflection film in a corrosion area, and slivering to obtain a solar cell. The solar cell manufactured by the method is high in conversion efficiency, reliability and flexibility, and weight is reduced. |
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