Method of manufacturing phosphorous pentafluoride and hexafluorophosphate

A process for phosphorus pentafluoride production by which high-purity phosphorus pentafluoride can be produced by a simple and economical procedure without the need of a large-scale purification apparatus or high-pressure apparatus and without generating a large amount of a by-product gas requiring a special discharge-gas treatment. The process for phosphorus pentafluoride production is characterized by introducing hydrogen fluoride and a hexafluorophosphate (MPF 6) into a vessel and reacting them according to the reaction shown by the scheme (1) to yield phosphorus pentafluoride. MPF 6 + uHF->PF 5 + MF.r(HF) (Scheme 1). In the scheme, M is at least any one of Li, Na, K, Rb, Cs, NH4, and Ag; 0