Multi-beam thick optical film monitor

The invention relates to a multi-beam thick optical film monitor and belongs to a device for monitoring an optical coated film in real time. The multi-beam thick optical film monitor mainly solves the technical problem that according to an existing optical film thickness monitor, the number of monit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ZHANG XIAOFEI, LYU ZIXIAO, DENG QI, ZHANG YIN, WANG JINGHUI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to a multi-beam thick optical film monitor and belongs to a device for monitoring an optical coated film in real time. The multi-beam thick optical film monitor mainly solves the technical problem that according to an existing optical film thickness monitor, the number of monitoring points is small, the monitoring precision is low, and the monitoring efficiency is low. According to the technical scheme, the multi-beam thick optical film monitor comprises a monochrometer, a photoelectric detector, a signal amplifier, a control computer, a position trigger circuit and a convergent lens and further comprises a halogen tungsten lamp, a rotary photochopper, at least three optical fiber light paths and a base plate support, wherein the rotary photochopper is arranged on a rotary tray and can rotate with the lamp filament of the halogen tungsten lamp as the center, each optical fiber light path is composed of a lens and optical fibers, the base plate support is arranged below the rotary photochopper, and monitoring points are arranged on the base plate support. The multi-beam thick optical film monitor has the advantages that the number of the monitoring points is large, the monitoring precision is high, and cost is low.