Bell-type atmosphere furnace applicable to sintering of ITO targets

The invention discloses a bell-type atmosphere furnace applicable to sintering of ITO targets. The bell-type atmosphere furnace comprises a furnace body, a furnace frame, a cooling system, an atmosphere control and adjustment system and a temperature control system. The furnace body is of a hollow structure mounted on the furnace frame. A cavity in the furnace body is arranged to be a furnace chamber. The bottom of the furnace body is provided with a kiln car serving as a movable furnace door. The kiln car can be connected with the furnace body in a sealed mode when closed as the movable furnace door. The top and the inner walls of the four sides of the furnace chamber are provided with high-temperature refractory layers. The top of the furnace body is provided with heating elements extending downwards into the furnace chamber. A cooling air pipeline of the cooling system penetrates through the sidewall of the bottom of the furnace body and is led into the furnace chamber. A ventilating pipeline of the atmosphere control and adjustment system penetrates through the sidewall of the bottom of the furnace body and is led into the furnace chamber. The temperature control system comprises a plurality of temperature measurement thermocouples mounted on the furnace body. The bell-type atmosphere furnace has the advantages of being simple in structure, low in cost, convenient to maintain, good in sintering effect and particularly applicable to sintering of the ITO targets.