Monocrystalline gallium oxide and monocrystalline gallium oxide substrate

[Problem] To provide a monocrystalline gallium oxide and monocrystalline gallium oxide substrate enabling improved light emission efficiency. [Solution] A monocrystalline gallium oxide (13) has a dislocation density of up to 3.5106/cm2. The monocrystalline gallium oxide (13) is produced by an EFG pr...

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Hauptverfasser: NISHIGUCHI KENGO, AIDA HIDEO, IKEJIRI KENJIRO, NAKAMURA MOTOICHI, KOYAMA KOUJI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:[Problem] To provide a monocrystalline gallium oxide and monocrystalline gallium oxide substrate enabling improved light emission efficiency. [Solution] A monocrystalline gallium oxide (13) has a dislocation density of up to 3.5106/cm2. The monocrystalline gallium oxide (13) is produced by an EFG process. The seed-touch temperature of the EFG process is 1930-1950 DEG C. The neck section (13a) of the monocrystalline gallium oxide (13) is 0.8 mm or less. A monocrystalline gallium oxide substrate (21) is composed of the monocrystalline gallium oxide (13).