Method for online analyzing methyl chlorosilane by adopting online raman spectrometer to build model

The invention discloses a method for online analyzing methyl chlorosilane by adopting an online raman spectrometer to build a model. The method comprises the following steps of combining a raman spectrum chart of a sample with analysis data acquired in a gas chromatographic method, acquiring a distr...

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Bibliographische Detailangaben
Hauptverfasser: CHENG SHUNDI, PAN YUNXIA, FANG PING, YAO SHIQUAN, LIU GENLAN, DENG QINGXIAN, LIU XUEMEI
Format: Patent
Sprache:chi ; eng
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