Method for online analyzing methyl chlorosilane by adopting online raman spectrometer to build model

The invention discloses a method for online analyzing methyl chlorosilane by adopting an online raman spectrometer to build a model. The method comprises the following steps of combining a raman spectrum chart of a sample with analysis data acquired in a gas chromatographic method, acquiring a distributive curve of each component in a calculation way by utilizing a statistics method, establishing a raman spectrum model of each component, predicting components of the sample by utilizing the raman spectrum model after scanning the sample by utilizing the online raman spectrometer, outputting a result and a time sequence curve, and realizing the real-time monitoring on variation of each component in methyl chlorosilane by virtue of the online raman spectrometer. The method has the advantages that sampling is not needed, the sample is not damaged, the operation is simple, the analysis is rapid, and the environmental pollution can be avoided.